Get Dry Etching for Microelectronics (Materials Processing: PDF

By Ronald A. Powell,R. A. Powell

This quantity collects jointly for the 1st time a chain of in-depth, serious experiences of significant themes in dry etching, similar to dry processing of III-V compound semiconductors, dry etching of refractory steel silicides and dry etching aluminium and aluminium alloys. This topical structure offers the reader with extra specialized info and references than present in a common assessment article. furthermore, it offers a wide viewpoint which might differently must be won via analyzing plenty of person examine papers. an extra very important and detailed characteristic of this publication is the inclusion of an intensive literature assessment of dry processing, compiled by way of seek of automatic info bases. a topic index permits prepared entry to the most important issues raised in all of the chapters.

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Dry Etching for Microelectronics (Materials Processing: Theory and Practices) by Ronald A. Powell,R. A. Powell

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