By Joseph C. Doll,Beth L. Pruitt
Piezoresistor layout and functions offers an outline of those MEMS units and comparable physics. The textual content demonstrates how MEMS permits miniaturization and integration of sensing in addition to effective packaging and sign conditioning. this article for engineers operating in MEMS layout describes the piezoresistive phenomenon and optimization in different applications. contains particular dialogue of such subject matters as; coupled versions of mechanics, fabrics and digital habit in quite a few universal geometric implementations together with pressure gages, beam bending, and membrane loading. The textual content concludes with an up to date dialogue of the necessity for built-in MEMS layout and possibilities to leverage new fabrics, tactics and MEMS technology.
Piezoresistor layout and purposes is a perfect ebook for layout engineers, approach engineers and researchers.
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Piezoresistor Design and Applications (Microsystems and Nanosystems) by Joseph C. Doll,Beth L. Pruitt